Gamma-ray and X-ray are powerful tools for analysis of internal material micro-structure. The technique is based on studying the leakage spectrum. Two basic phenomena are involved in this work, namely photo-electric effect and Compton scattering. We derived the fundamental equations to calculate four components contributed in building up the leakage spectrum, which are Compton-Compton, Rayleigh-Compton, Compton-Rayleigh and Rayleigh -Rayleigh scattering. Results of our calculation and measurements for aluminum target showed very good agreement.
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